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Conferences > DFM > 1995 > DGGC > DGGC441
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DGGC441

Mass and Energy Transport in an H2 Microwave Plasma Obtained Under Diamond Deposition Discharge Conditions: Role of the Spatial Distribution of the Microwave Power Density.

K. Hassouni, S. Farhat, C. D. Scott, and A. Gicquel

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Abstract

The set of transport governing equations of thermochemically non equilibrium H2 plasma are solved for discharge conditions (power, pressure) corresponding to that of diamond deposition and for a one dimensional diffusive flow. Several reactor simulations corresponding to different axial distributions of the absorbed microwave power density are carried out. The effects of the total absorbed power density and the position of the maximum of the absorbed power density on the axis are studied.

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