Abstract
We report on the construction and operation of the laboratory-scaled soft X-ray reflectometer at the Institute of Applied Photonics e.V. in Berlin. With a µ m-sized source and flexible high-precision mechanics, the competitive capabilities range from the determination of diffraction efficiencies for variable line space gratings to the characterization of mirrors by an evaluation of the emitted wave front.
© 2020 The Author(s)
PDF Article | Presentation VideoMore Like This
Alexei Erko, Christoph Braig, Jürgen Probst, Thomas Krist, and Christian Seifert
EF3A.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2022
Eberhard Spiller
TuB1 OSA Annual Meeting (FIO) 1990
Mario Ferraro, Maria C. Crocco, Raffaele Filosa, Andrea Solano, Raffaele G. Agostino, Riccardo C. Barberi, Fabio Mangini, Mario Zitelli, Vincent Couderc, Mariusz Klimczak, Adam Filipkowski, Ryszard Buczynski, Stefan Wabnitz, and Vincenzo Formoso
STh3G.6 CLEO: Science and Innovations (CLEO:S&I) 2023