Abstract

Chlorinated and hydrogenated amorphous silicon films have been prepared by glow discharge at various R. F. power. Chlorine content in our samples are measured by electron microprobe analysis. Typical concentration of chlorine is 6%. The hydrogen content is 5 to 10% as calculated by integrating the 640cm⁻¹ wagging band. At low powers (5 watts), the infra-red vibrational spectra show the appearance of a chlorine induced band at 545cm⁻¹ and several hydrogen induced bands at 640cm⁻¹, 740cm⁻¹, 840cm⁻¹, 890cm⁻¹, 2000cm⁻¹ and 2100cm⁻¹.

© 1984 Optical Society of America