Abstract
We report on the photoluminescence (PL) in the amorphous alloys: a-SiOx:H, a-SiNx:H, a-SixC1-x:H over a wide range of x. The films were prepared by glow discharge decomposition of suitable mixtures of SiH4 with N2O, NH3, and CH4 (C2H4), respectively.
© 1984 Optical Society of America
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