Photoinscribed waveguide and grating in Polyglass on silicon

T. Touam; X. M. Du; X. M. Du; M. P. Andrews; S. I. Najafi

doi:10.1364/IODC.1998.LFD.4

International Optical Design Conference
Technical Digest Series (Optica Publishing Group, 1998),
paper LFD.4
•https://doi.org/10.1364/IODC.1998.LFD.4

Photoinscribed waveguide and grating in Polyglass on silicon

T. Touam, X. M. Du, M. P. Andrews, and S. I. Najafi

International Optical Design Conference 1998

Kailua-Kona, Hawaii United States
8–12 June 1998
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Integrated Optics (LFD)

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T. Touam, X. M. Du, M. P. Andrews, and S. I. Najafi, "Photoinscribed waveguide and grating in Polyglass on silicon," in International Optical Design Conference, Technical Digest Series (Optica Publishing Group, 1998), paper LFD.4.

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Abstract

We report on the fabrication, characterization and analysis of waveguides and gratings imprinted by an ultraviolet lamp and a 193 nm excimer laser in polyglass on silicon prepared by a low temperature sol-gel process.

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