Microlithographic lens for DUV scanner

Tomoyuki Matsuyama; Yuichi Shibazaki

doi:10.1364/IODC.2002.IMD4

International Optical Design Conference
2002 OSA Technical Digest Series (Optica Publishing Group, 2002),
paper IMD4
•https://doi.org/10.1364/IODC.2002.IMD4

Microlithographic lens for DUV scanner

Tomoyuki Matsuyama and Yuichi Shibazaki

International Optical Design Conference 2002

Tucson, Arizona United States
3–5 June 2002
ISBN: 1-55752-714-8

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Lithography Systems (IMD)

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T. Matsuyama and Y. Shibazaki, "Microlithographic lens for DUV scanner," in International Optical Design Conference, 2002 OSA Technical Digest Series (Optica Publishing Group, 2002), paper IMD4.

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Abstract

This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for Nikon’s DUV (Deep Ultra Violet) scanner.

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