Abstract

"Direct-write" technologies for the laser processing of semiconductors use sharply focused laser beams to induce localized chemical reactions at semiconductor surfaces. Though these processes are slow compared with conventional optical printing, they are of scientific interest and they appear promising for applications involving the customizing, repairing, and testing of integrated circuits. There also has been interest in "self-developing" photoresists; these are materials that ablate during exposure to optical radiation. The use of a self-developing resist eliminates the need for a development step following exposure.

© 1985 Optical Society of America