Abstract

Ion-induced reactions on a variety of surfaces have been studied by a number of research groups during the past decade. Typically, gas phase product distributions, both of abundance and kinetic energy, are measured during exposure to inert ions and a reactive gas. From these results the emission mechanisms of the various gas phase products have been determined. Knowledge of the emission mechanisms, together with additional information on the “ion mixing” process, has allowed some conclusions to be obtained on the ion-induced surface reactions.

© 1989 Optical Society of America