Similarities and differences in the growth and the optical properties of reactive evaporated and IAD deposited high index cubic metal oxide films

Roland Thielsch

doi:10.1364/OIC.2007.TuA3

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper TuA3
•https://doi.org/10.1364/OIC.2007.TuA3

Similarities and differences in the growth and the optical properties of reactive evaporated and IAD deposited high index cubic metal oxide films

Roland Thielsch

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Coating Microstructure (TuA)

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R. Thielsch, "Similarities and differences in the growth and the optical properties of reactive evaporated and IAD deposited high index cubic metal oxide films," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper TuA3.

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Abstract

(Y)ZrO₂, Y₂O₃ and CeO₂ films were manufactured by evaporation and ion assisted deposition. XRD structural analysis, pole figure measurements, and analysis of the refractive index revealed differences in the growth and in – plane alignment.

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