XPS analysis of IAD fluoride films

Charles M. Kennemore; Ursula J. Gibson

doi:10.1364/OAM.1986.MQ2

Annual Meeting Optical Society of America
Technical Digest Series (Optica Publishing Group, 1986),
paper MQ2
•https://doi.org/10.1364/OAM.1986.MQ2

XPS analysis of IAD fluoride films

Charles M. Kennemore and Ursula J. Gibson

OSA Annual Meeting 1986

Seattle, Washington United States
19–25 October 1986
ISBN:

From the session
Thin-Film Processes and Materials (MQ)

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C. M. Kennemore and U. J. Gibson, "XPS analysis of IAD fluoride films," in Annual Meeting Optical Society of America, Technical Digest Series (Optica Publishing Group, 1986), paper MQ2.

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Abstract

Investigation of the core electron binding energies by x-ray photoelectron spectroscopy (XPS) allows the determination not only of the elemental composition of the film but also the detection of the various compounds of the constituent elements due to the measurable shift in the electron binding energies associated with chemical bonding.

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