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Conferences > OECC > 1996 > 18C2 > 18C2.2
  • First Optoelectronics and Communications Conference
  • Technical Digest Series (Optica Publishing Group, 1996),
  • paper 18C2.2

Polarization Independent FDM/WDM Coupler Using Low Birefringence Silica Optical Waveguide Deposited by APCVD

Tadahiko Hanada, Mitsuhiro Kitamura, and Sinichi Nakamura

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Abstract

TEOS-O3 based APCVD method .was adopted for silica waveguide FDM / WDM couplers on silicon substrates. Completely polarization independent narrow band (100GHz) FDM coupler was obtained, due to drastically reduced birefringence by APCVD process.

© 1996 IEICE

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