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Conferences > OECC > 1996 > 18P > 18P.19
  • First Optoelectronics and Communications Conference
  • Technical Digest Series (Optica Publishing Group, 1996),
  • paper 18P.19

A high-sensitivity low-dark-current waveguide PIN photodiode for surface-hybrid integration

M. Shishikura, H. Nakamura, S. Tanaka, Y. Matsuoka, T. Ono, T. Miyazaki, and S. Tsuji

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Abstract

A waveguide PIN photodiode with a thick double-core is fabricated for surface-hybrid integration. High quantum efficiency of 0.95 A / W and low dark current of 350 pA at a bias voltage of 2.0 V are demonstrated.

© 1996 IEICE

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