Methods for Characterizing Surface Topography

T.V. Vorburger

doi:10.1364/OFT.1987.ThAA1

Workshop on Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1987),
paper ThAA1
•https://doi.org/10.1364/OFT.1987.ThAA1

Methods for Characterizing Surface Topography

T.V. Vorburger

Optical Fabrication and Testing 1987

Rochester, New York United States
20–23 October 1987
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Metrology: 1 (ThAA)

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T. V. Vorburger, "Methods for Characterizing Surface Topography," in Workshop on Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1987), paper ThAA1.

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Abstract

We divide the field of surface topography characterization into profiling techniques, area techniques, and microscopy. We briefly describe each category, and give a summary of the various areas of application for each.

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