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Fabrication of 2-D Glass Lens Arrays by a Photolithographic Technique

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Abstract

The method of preparing glass microlenses by a photo-thermal process has been described in prior publications. (1-4). In brief, it involves the photonucleation of a phase within the glass. The physical density of the photonucleated phase is larger than that of the unexposed virgin glass. Thus an exposure through an appropriate exposure mask,(opaque dots on an otherwise clear background), followed by heating to 600°C, forms cylindrical regions of soft unexposed glass which are squeezed beyond the surface during the thermal treatment, forming the spherical shaped protrusions.

© 1990 Optical Society of America

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