Abstract

A survey is given of present, still rather sketchy, knowledge of (a) preferential sputtering of certain species in multielement materials, (b) the subsequent formation of a near surface layer with altered composition, (c) the total sputtering yields as a function of composition after steady-state conditions are established, and (d) the angular ejection distribution of different species. The basic differences between single phase alloys or compounds and multiphase alloys and materials with volatile species are described.

© 1984 Optical Society of America