Short Wavelength Coatings for Large Optics

J. Kurdock; E. Strouse; B. Tirri

doi:10.1364/OIC.1988.TuE3

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper TuE3
•https://doi.org/10.1364/OIC.1988.TuE3

Short Wavelength Coatings for Large Optics

J. Kurdock, E. Strouse, and B. Tirri

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
ISBN:

From the session
X-Ray and Extreme Ultraviolet Coatings (TuE)

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J. Kurdock, E. Strouse, and B. Tirri, "Short Wavelength Coatings for Large Optics," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper TuE3.

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Abstract

The application of X-ray and VUV coatings on large optics pose unique problems for the coating engineer. Facility design, process development, and characterization will be discussed for several applications.

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