Abstract

Silica is the preferred low refractive index material for high laser damage threshold coatings at 1.06 μm. In order to coat large aperture optics, the thickness distribution of the evaporant plume should be as broad as possible while carve-in of the source avoided. High frequency sweep e-beam systems offer the possibility of more stable temperature profiles in the source for thickness uniformity; and programmable sweep controllers offers the possibility of more efficient erosion patterns in the source.

© 1995 Optical Society of America