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Narrowband Mg/SiC Multilayers Working around 30.4 nm

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Abstract

Narrowband Mg/SiC multilayer mirrors working around 30.4 nm with a significantly reduced bandwidth (FWHM ≈ 0.7 nm) basing on high order reflection have been designed and fabricated by direct-current (DC) magnetron sputtering.

© 2019 The Author(s)

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