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Conferences > OIC > 2022 > ThA > ThA.6

ZrO2 optical coatings with high toughness deposited by magnetron sputtering

Jincheng Qian, Bill Baloukas, Etienne Bousser, Carlo A. Kosik Williams, James J. Price, Charles A. Paulson, Shandon D. Hart, Karl W. Koch, Robert A. Bellman, Jolanta Klemberg-Sapieha, and Ludvik Martinu

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Abstract

ZrO2 coatings deposited by low duty cycle pulsed DC magnetron sputtering exhibit good optical properties, low compressive stress (-110 MPa), and excellent mechanical properties (a hardness of ~14 GPa, a toughness of > 3 MPa∙m-2).

© 2022 The Author(s)

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