Characterization of Nb2O5, Ta2O5 and SiO2 single layers by spectrophotometry and ellipsometry

Vladimir Pervak; Vladimir Pervak; Anna Sytchkova

doi:10.1364/OIC.2022.ThA.8

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThA.8
•https://doi.org/10.1364/OIC.2022.ThA.8

Characterization of Nb₂O₅, Ta₂O₅ and SiO₂ single layers by spectrophotometry and ellipsometry

Vladimir Pervak and Anna Sytchkova

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Characterization I: Optical and Mechanical Properties of Nanostructures and Coatings (ThA)

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V. Pervak and A. Sytchkova, "Characterization of Nb2O5, Ta2O5 and SiO2 single layers by spectrophotometry and ellipsometry," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThA.8.

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Abstract

We compare the dispersion of refractive indexes for popular oxide materials (Nb₂O₅, Ta₂O₅, SiO₂) obtained by spectrophotometry and ellipsometry. We investigate how the difference between these two data sets impacts the design of filters and dispersive mirrors.

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