Accurate optical properties by simultaneous fitting of spectroscopic datasets of single- &amp; multi-layers

Naoki Kawasaki; Bin Fan; Kei-ichi Namiki; Yunglin Chang; Takayuki Kobayashi; Hyuga Taniguchi

doi:10.1364/OIC.2022.ThA.7

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThA.7
•https://doi.org/10.1364/OIC.2022.ThA.7

Accurate optical properties by simultaneous fitting of spectroscopic datasets of single- & multi-layers

Naoki Kawasaki, Bin Fan, Kei-ichi Namiki, Yunglin Chang, Takayuki Kobayashi, and Hyuga Taniguchi

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

From the session
Characterization I: Optical and Mechanical Properties of Nanostructures and Coatings (ThA)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
N. Kawasaki, B. Fan, K. Namiki, Y. Chang, T. Kobayashi, and H. Taniguchi, "Accurate optical properties by simultaneous fitting of spectroscopic datasets of single- & multi-layers," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThA.7.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get Video
Citation alert
Save article

Abstract

We have developed an analytical method to determine accurate optical properties by a simultaneous fitting of spectroscopic measurements of single- and multilayers. Here, TiN and TiN/SiN samples are subjected to an evaluation of the method.

PDF Article | Presentation Video

More Like This

Thickness Dependent Optical Properties of Plasmonic Transdimensional Titanium Nitride

Deesha Shah, Morris Yang, Zhaxylyk Kudyshev, Vladimir M. Shalaev, Igor Bondarev, and Alexandra Boltasseva
FF4C.2 CLEO: QELS_Fundamental Science (CLEO:FS) 2022

Optical Properties and Thermal Stability of Niobium-pentoxide Single Layers

N. Beermann, H. Ehlers, and D. Ristau
TuF6 Optical Interference Coatings (OIC) 2004

Optical properties of silicon-rich silicon nitride for photonic integrated circuits

Natale G. Pruiti, Christopher Gough, Stuart May, and Marc Sorel
SF3O.2 CLEO: Science and Innovations (CLEO:S&I) 2022

Previous Article Next Article

Poster Presentation

Media 1: PDF (1212 KB)

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads