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Conferences > OIC > 2022 > ThB > ThB.7

A new spatially and angularly resolved scatterometer

Adrien Bolliand, Edith Hartmann, Michel Lequime, Myriam Zerrad, and Claude Amra

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Abstract

We present the main improvements to a scatterometer developed at the Fresnel Institute allowing the spatially resolved recording (up to 1 million elementary pixels) of the light transmitted or scattered by a plane sample.

© 2022 The Author(s)

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