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Conferences > OIC > 2022 > ThB > ThB.9

Automatic spectral calibration of a wavelength and angle resolved scatterometer

Marin Fouchier, Myriam Zerrad, Michel Lequime, and Claude Amra

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Abstract

We describe the latest improvements of our spectral and angular light scattering characterization apparatus (SALSA) and in particular its automatic spectral calibration using gas discharge sources.

© 2022 The Author(s)

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