A multiwavelength angle-resolved scatterometer or how to extend the optical window

C. Amra; P. Roche; D. Torriccini

doi:10.1364/OIC.1992.JWB7

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1992),
paper JWB7
•https://doi.org/10.1364/OIC.1992.JWB7

A multiwavelength angle-resolved scatterometer or how to extend the optical window

C. Amra, P. Roche, and D. Torriccini

Optical Interference Coatings 1992

Tucson, Arizona United States
1–5 June 1992
ISBN:

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Joint Session on Scattering 2 (JWB)

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C. Amra, P. Roche, and D. Torriccini, "A multiwavelength angle-resolved scatterometer or how to extend the optical window," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1992), paper JWB7.

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Abstract

Light scattering constitutes a powerful tool to characterize surface roughness at the scale of optical frequencies. Many results have been published [1] and show that the measured roughness spectrum is an intrinsic property of the surfaces. This valids both the accuracy of the scatterometer and the validity of the electromagnetic theory.

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