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Conferences > OIC > 2022 > ThC > ThC.3

Sputter deposition of amorphous TiO2 with low defect levels

Stephan Mingels, Thomas van Pelt, Navas Illyaskutty, Deniz Sabuncuoglu Tezcan, and Harro Hagedorn

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Abstract

We developed a novel sputter process for deposition of amorphous layers from TiO2 with low defects levels for precision optics and photonics applications. The layer properties were investigated by XSEM, GIXRD, and particle measurements.

© 2022 The Author(s)

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