High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Lewis Fleming; Lewis Fleming; Des Gibson; Des Gibson; Shigeng Song; Shigeng Song; David Hutson; David Hutson; Sam Ahmadzadeh; Sijia Cai; Daxing Han; Ewan Waddell; John Saffell

doi:10.1364/OIC.2022.ThC.4

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper ThC.4
•https://doi.org/10.1364/OIC.2022.ThC.4

High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers

Lewis Fleming, Des Gibson, Shigeng Song, David Hutson, Sam Ahmadzadeh, Sijia Cai, Daxing Han, Ewan Waddell, and John Saffell

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

From the session
Progress in Conventional PVD (ThC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
L. Fleming, D. Gibson, S. Song, D. Hutson, S. Ahmadzadeh, S. Cai, D. Han, E. Waddell, and J. Saffell, "High throughput microwave plasma assisted sputter deposition of linear variable filters and deployment into visible and near infrared spectrometers," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper ThC.4.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get Video
Citation alert
Save article

Abstract

Fabrication of linear variable filter designs are demonstrated using a high throughput drum with linear sputter targets and static graded uniformity masks. Optical performances are characterised and functionality tested in 3D printed miniature spectrometers.

PDF Article | Presentation Video

More Like This

Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, and Peter Mackay
ThC.7 Optical Interference Coatings (OIC) 2022

Design and Fabrication of a patterned dual colour filter using Microwave plasma assisted Sputtering and Photolithography

Jonathan Pomfret, Sijia Cai, Daxing Han, Des Gibson, Shigeng Song, David Hutson, and Peter Mackay
MD.8 Optical Interference Coatings (OIC) 2022

Tantalum Oxide and Silica Mixture Coatings Deposited Using Microwave Plasma Assisted Co-sputtering for Optical Mirror Coatings in Gravitational Wave Detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhan, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain Martin, Sheila Rowan, and Des Gibson
WB.2 Optical Interference Coatings (OIC) 2022

Previous Article Next Article

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads