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Durable MgOxFy Dual-Band AR Coating for the Visible and Near Infrared

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Abstract

We developed MgOxFy based VIS-NIR dual-band anti-reflective coatings by thermally evaporating MgF2 with reactive oxygen plasm assisted deposition. The MgOxFy approach improved durability and cleanability of the AR coatings.

© 2022 The Author(s)

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