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Monolithic Integration of GaAs/AlGaAs Multiple Quantum Well Modulators and Silicon Metal-Oxide-Semiconductor Transistors

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Abstract

We demonstrate coexisting operation of a GaAs/AlGaAs multiple quantum well modulator and a submicron gate length metal-oxide-semiconductor transistor fabricated on the same chip, for applications in optical interconnects.

© 1993 Optical Society of America

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