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Effects of Sputtering Pressure on Roughness and Resputtering of Multilayers

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Abstract

This summary outlines studies of W-Si and Co-Cu multilayers. We recognize that W-Si is unlikely to make optimal x-ray mirrors, because Si is more strongly absorbing than, say, carbon for most radiation wavelengths, and because the known propensity of metal-silicon couples to interdiffuse to form silicides suggests that interfaces’are unlikely to be very sharp. W-Si is, though, a useful model system. A more extensive account of our work with W-Si and related systems is contained in [1]. Interfacial roughness is important in determining the properties not only of x-ray mirrors, but also of multilayer systems which exhibit so-called "giant magnetoresistance". We are using Co-Cu as a model system with which to study this phenomenon.

© 1992 Optical Society of America

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