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An Experimental Set-up for the Production of Large Size X-Ray Multilayer Structures

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Abstract

Multilayer-based x-ray optical components call for heterostructures made of smooth and uniform layers with an abrupt interface, which imposes severe restrictions to the choice of materials. The multilayers have to be very uniform (1%) over the area that will be illuminated by an X-ray beam. For hard x-rays the small angle of incidence implies multilayers that are several tens of centimeter long, even when using a small d-spacing. When the beam is produced by a synchrotron storage ring source the high heat flux connected with the intense x-ray beams requires materials that are chemically very stable.

© 1992 Optical Society of America

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