Soft X-ray Multilayer Mirrors

Fan Zhengxiu

doi:10.1364/SXRAY.1992.PD5

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper PD5
•https://doi.org/10.1364/SXRAY.1992.PD5

Soft X-ray Multilayer Mirrors

Fan Zhengxiu

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
ISBN:

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F. Zhengxiu, "Soft X-ray Multilayer Mirrors," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper PD5.

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Abstract

The present status of studies on soft x-ray multilayer mirrors in our institute are described. These include the optimum design, deposition technique and the preliminary characterizations.

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