Abstract

The present status of studies on soft x-ray multilayer mirrors in our institute are described. These include the optinum design, deposiion technique and the preliminary characterizations. W/C, Ta/Si, Mo/Si, Mo/Al multilayers, which are designed as mirrors at 105A, 135A and 234A respectively, have been fabricated with DC- and RF- plane magnetron sputtering system. Small Angle Diffraction with Cu-Ka radiation, Transmission Electron Microscopy and Auger Electron Spectroscopy have been applied to investigate the informations about the interfaces and the layer thickness monitor random errors and the roughness of the layer systems. Our reflectometer have also given us some informations about the optical constants.

© 1992 Optical Society of America