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Mosaic Reflectivity of X-ray Multilayer Structures

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Abstract

Mosaic reflectivity from multilayer structures has previously been detected1) but only in a limited angular range close to the Bragg angle (θB) and only at a single energy. In this paper, a systematic study of the mosaic reflectivity is performed at five line energies (B-Kα (0.183 keV), Cr-Lα (0.573 keV), Ni-Lα (0.852 keV), Pd-Lα (2.838 keV), Cu-Kα (8.048 keV)) for a series of Ni/C multilayers with similar d-spacings and similar ratio between Ni-content and C-content but different deposition methods. The mosaic reflectivity is measured in the complete angular range from zero to 2 θB around the first order Bragg peak. Several interesting and novel effects are revealed. First of all, it is observed that the mosaic reflectivity increases linearly as the angle of incidence is decreased. Secondly, the mosaic reflectivity is observed to decrease sharply as one enters the total reflection region. Thirdly, the mosaic reflectivity disappears completely as the angle of incidence approaches twice the Bragg angle. Finally, the mosaic reflectivity varies in a characteristic way with the energy.

© 1992 Optical Society of America

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