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Conferences > SXRAY > 1991 > ThB > ThB3

Achieving Uniform Multilayer Coatings on Figured Optics

W. K. Waskiewicz, D. L. Windt, J. E. Bjorkholm, L. Eichner, R. R. Freeman, T. E. Jewell, W. M. Mansfield, A. A. MacDowell, W. M. Simpson, L. H. Szeto, D. M. Tennant, D. Taylor, G. Taylor, D. L. White, and O. R. Wood

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Abstract

Spatial uniformity of the multilayer coatings deposited onto figured optics for soft x-ray projection lithography optical systems must be accurately controlled in order to maintain high throughput, and to preserve the imaging quality of the substrate. Controlling the uniformity with the desired accuracy can be quite challenging however, due to the nature of the deposition process.

© 1991 Optical Society of America

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