Abstract

An extensive series of one- and two-dimensional LASNEX simulations have been performed to establish the parameter range for efficient conversion of laser light into soft-x-rays in spectral regions of interest to x-ray lithography. In particular, the calculations assumed that 1.06 µm and .53 µm laser light of varying intensity was deposited on stainless steel and Tantalum slab targets. The subsequent emission of radiation in several spectral regions, between 10-14 Å and at 124 Å, was monitored as the high-temperature plasma evolved, and the overall conversion efficiency was calculated after the emission ended.

© 1991 Optical Society of America