Soft X-Ray Projection Lithography in Japan

Hiroo Kinoshita

doi:10.1364/SXRAY.1993.TuA.2

Soft X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1993),
paper TuA.2
•https://doi.org/10.1364/SXRAY.1993.TuA.2

Soft X-Ray Projection Lithography in Japan

Hiroo Kinoshita

Soft X-Ray Projection Lithography 1993

California United States
10–12 May 1993
ISBN:

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Imaging Experiments (TuA)

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H. Kinoshita, "Soft X-Ray Projection Lithography in Japan," in Soft X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1993), paper TuA.2.

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Abstract

Soft X-Ray Projection Lithography has attracted special interest recently. In Japan, reduction optics with multilayer mirrors has been developed and first demonstrated in 1986 by NTT¹).

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