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Femtosecond laser direct writing of sub-wavelength surface structures on metal and semiconductor materials

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Abstract

Fabrication of ripples or laser induced periodic sub-wavelength surface structures (LIPSS) on semiconductor material Silicon (Si) and on metals Aluminum (Al) and Copper (Cu) by femtosecond (fs) laser direct writing are reported in this letter.

© 2014 Optical Society of America

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