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Conferences > DFM > 1995 > DGGC > DGGC437
  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DGGC437

In Situ OES Diagnosis of the DC ARC Plasma JET in the Systhesis of Diamond

Zhen Yan, Zhiwei Zhang, and Hesun Zhu

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Abstract

This paper discusses the in situ optical emission spectroscopy system for diagnosis of the DC arc plasma jet used in the synthesis of diamond. The effects of power, the methane flux and the hydrogen flux on the CH, H and C2 species in the plasma as well as on experimental results are analyzed. The work provides basis for better process control and further theoretic research.

© 1995 Optical Society of America

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