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Conferences > EUL > 1996 > A > A212

Mass-producible microtags

William C. Sweatt, Michael R. Descou, Avijit K. Ray-Chaudhuri, Kevin D. Krenz, Daniel A. Tichenor, Richard H. Stulen, Mial E. Warren, and Stan H. Kravitz

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Abstract

The microtag concept has been developed for security purposes. Microtags can be mass-produced using an advanced extreme-ultraviolet lithography (EUVL) tool currently under development at Sandia National Laboratories in Livermore. This method of fabrication results in features small enough (down to 100 nm) to deter most attempts at counterfeiting. Microtags may therefore be used to protect integrated circuits, currency, credit cards, and smart cards.

© 1996 Optical Society of America

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