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Conferences > FiO > 2023 > JTu4A > JTu4A.79

Epsilon-Near-Zero Modulators Integrated on Si3N4 Waveguides for Operation Shorter than 1µm

Michael G. Wood, Patrick S. Finnegan, Katherine M. Musick, William M. Mook, Christopher D. Nordquist, Alejandro J. Grine, and Darwin K. Serkland

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Abstract

We report on the demonstration of epsilon-near-zero (ENZ) modulators operating at 980nm by integrating indium oxide thin films on silicon nitride waveguides. This work enables ENZ modulators to operate in the near-infrared and visible bands.

© 2023 The Author(s)

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