Abstract

Epitaxial lift-off can be effectively used to transfer thin-film semiconductor layers from their parent substrate to foreign substrates that are not necessarily made of semiconductor material.¹ The transferred films are bonded, without glue, to the target substrate by van der Waals forces. The potential of this technique is greatly enhanced by grafting semiconductor layers directly onto substrates with optical waveguide circuits and, additionally, by establishing optical interaction between the two.

© 1990 Optical Society of America