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Lateral bandgap engineering using shadow masked growth

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Abstract

The fabrication of photonic integrated circuits requires the integration and optical coupling of waveguiding devices with different bandgaps. Recently, there has been much interest in obtaining this integration in a single growth step. One of the possibilities is to use quantum-well devices and locally change the thickness (or bandgap) by patterning the substrate.1 This paper describes the use of shadow-masked growth to obtain lateral bandgap engineering.2

© 1991 Optical Society of America

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