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Optica Publishing Group
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper OW2B.5

LIFT: Implementation of a new algorithm for spatial resolution enhancement in wavefront sensing-based metrology

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Abstract

We will present a new approach of linearized focal plane technique (LIFT), formerly developed by ONERA, which results in an improvement of a factor of 16 (4x4) of the spatial resolution. This technology is based on the combination of standard SH technology with phase retrieval algorithms applied on all spots of the microlens array that provides information on high spatial frequencies. We will show some measurements performed on extremely complex wavefronts. This technology presents very promising perspectives for optical and freeform metrology and can advantageously replace, at lower cost and better usability, Fizeau interferometry.

© 2023 The Author(s)

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