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Refractive Index Determination using an Orthogonalized Dispersion Equation

C. K. Carniglia, K. N. Schrader, P. A. O'Connell, and S. R. Tuenge

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Abstract

The refractive index n and thickness t of a thin-film coating can be determined from ellipsometric measurements of light reflected from the film. If data are taken over a broad range of wavelengths, then a range of values of n and t are obtained. The variation in n is expected and is a measure of the dispersion of the material. The variation in t, which is often found, results from the failure of a single-layer model to explain the measured data. This may occur because the film is inhomogeneous or anisotropic.

© 1988 Optical Society of America

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