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Spectroscopic Ellipsometry (SE), has been used for several years to measure the thicknesses and refractive indices of optical multilayers (ref 1). The spectral range of SE, which starts in the UV with PMT, has been extended to 1.7μ by the use of NIR detectors. In the mid IR, 2 to 16μm, where atmospheric windows exist, most thin film coating measurements are made by spectrophotometry.
© 1992 Optical Society of America
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