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Conferences > OIC > 1998 > FB > FB.4

Inhomogeneous film deposition of SiOxNy by laser ablation

F. Villa, G. Soto, E. C. Samano, L.E. Regalado, and R. Machorro

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Abstract

Optical interference filters are made by sequentially depositing a discrete number of layers of materials with different refractive indices. The most popular is the high-low index multilayer, essential building block for the optical industry (Ref. 1). Unfortunately, the use of discrete layers and the limited number of available refractive indices restrict the possibilities of optical performance.

© 1998 Optical Society of America

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