Manufacturing of Si-based hybrid metamaterials for increasing the refractive index in interference coatings

Philipp Henning; Marco Jupé; Marco Jupé; Stefan Bruns; Thomas Melzig; Morten Steinecke; Andreas Wienke; Andreas Wienke; Michael Vergöhl

doi:10.1364/OIC.2022.MD.1

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper MD.1
•https://doi.org/10.1364/OIC.2022.MD.1

Manufacturing of Si-based hybrid metamaterials for increasing the refractive index in interference coatings

Philipp Henning, Marco Jupé, Stefan Bruns, Thomas Melzig, Morten Steinecke, Andreas Wienke, and Michael Vergöhl

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Small: Metamaterials, Nanostructures, Patterned Filters (MD)

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P. Henning, M. Jupé, S. Bruns, T. Melzig, M. Steinecke, A. Wienke, and M. Vergöhl, "Manufacturing of Si-based hybrid metamaterials for increasing the refractive index in interference coatings," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper MD.1.

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Abstract

Si/SiO₂ metamaterials are produced by magnetron sputtering, and allow for a high refractive index of ~3 in the visible, as shown by model calculations. In these hybrid materials the absorption edge of Si is blue-shifted due to quantization effects.

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