Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2022 > WC > WC.6

Plasma emission spectroscopy related to the optical properties of silicon oxynitride films for inhomogeneous filters

Ramón Rodríguez López RRL, Noemi Abundiz Cisneros NAC, Roberto Sanginés de Castro RSC, Juan Águila Muñoz JAM, and Roberto Machorro Mejía RMM.

Not Accessible

Your library or personal account may give you access

Abstract

The optical plasma spectroscopy was correlated with the optical properties of SiNxOy synthesized by reactive magnetron sputtering. A principal component analysis of the system data was developed to monitor the synthesis of inhomogeneous filters.

© 2022 The Author(s)

PDF Article  |   Presentation Video
More Like This
Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016

Emission spectroscopy during plasma-assisted deposition of thin films in relation to their optical properties

Karl H. Guenther, Xiaofeng Han, Shunning Qian, Shankar Raneru, Thomas C. Kimble, and Sohrab Zarrabian
WPP.3 OSA Annual Meeting (FIO) 1993

Sputter Deposition of Silicon Oxynitride Gradient and Multilayer Coatings

Joern Weber, Hagen Bartzsch, and Peter Frach
MA5 Optical Interference Coatings (OIC) 2007

View More...

Poster Presentation

Media 1: PDF (1293 KB)     

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads

More Like This
Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016

Emission spectroscopy during plasma-assisted deposition of thin films in relation to their optical properties

Karl H. Guenther, Xiaofeng Han, Shunning Qian, Shankar Raneru, Thomas C. Kimble, and Sohrab Zarrabian
WPP.3 OSA Annual Meeting (FIO) 1993

Sputter Deposition of Silicon Oxynitride Gradient and Multilayer Coatings

Joern Weber, Hagen Bartzsch, and Peter Frach
MA5 Optical Interference Coatings (OIC) 2007

View More...
Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, and Peter Mackay
ThC.7 Optical Interference Coatings (OIC) 2022

Tuning the Optical Properties of Niobium-doped ZnO Films

Lirong Sun, John G. Jones, and Peter R. Stevenson
TD.4 Optical Interference Coatings (OIC) 2022

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use