Abstract
Development of platinum-carbon(Pt/C) multilayers is aimed at applying to grazing incidence x-ray optical systems such as x-ray telescope, x-ray microscope and x-ray beamline optics of synchrotron radiation.
© 1992 Optical Society of America
PDF ArticleMore Like This
Katsuhiko Murakami, Hiroshi Nakamura, Tetsuya Oshino, and Hideo Nikaido
ThB4 Soft X-Ray Projection Lithography (SXRAY) 1991
A.D. Akhsakhalyan, A.A. Fraerman, Yu. Ya. Platonov, N.I. Polushkin, and N.N. Salashchenko
MC3 Physics of X-Ray Multilayer Structures (PXRAYMS) 1992
R. Dietsch, S. Hopfe, H. Mai, G. Oertel, W. Pompe, M. Prokop, B. Schöneich, S. Völlmar, B. Wahner, P. Weiβbrodt, and P. Werner
MC2 Physics of X-Ray Multilayer Structures (PXRAYMS) 1992