Schwarzchild microscope for carbon Kα radiation

Katsuhiko Murakami; Hiroshi Nakamura; Tetsuya Oshino; Masayuki Ohtani; Hiroshi Nagata

doi:10.1364/SXRAY.1992.WA4

Soft-X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1992),
paper WA4
•https://doi.org/10.1364/SXRAY.1992.WA4

Schwarzchild microscope for carbon Kα radiation

Katsuhiko Murakami, Hiroshi Nakamura, Tetsuya Oshino, Masayuki Ohtani, and Hiroshi Nagata

Soft X-Ray Projection Lithography 1992

Monterey, California United States
6–8 April 1992
ISBN:

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Imaging Experiments (WA)

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K. Murakami, H. Nakamura, T. Oshino, M. Ohtani, and H. Nagata, "Schwarzchild microscope for carbon Kα radiation," in Soft-X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1992), paper WA4.

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Abstract

With the development of x-ray multilayers, Schwarzchild optics can be applied to x-ray imaging such as microscopic imaging¹ and projection lithography^2,3.

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